Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel)
نویسندگان
چکیده
منابع مشابه
Electrostatic Micro-actuator Structural Analysis Using Genetic Algorithm
This study is devoted to providing predictions of the pull-in parameters (pull-in voltage and pull-in displacement) of electro-statically actuated micro-beams based on a continuous model using Genetic Algorithm (GA) technique. A phenomenon in which the actuated electrode comes in direct contact with the fixed electrode due to the electrostatic force is called pull-in instability. Accurate deter...
متن کاملA small-gap electrostatic micro-actuator for large deflections
Common quasi-static electrostatic micro actuators have significant limitations in deflection due to electrode separation and unstable drive regions. State-of-the-art electrostatic actuators achieve maximum deflections of approximately one third of the electrode separation. Large electrode separation and high driving voltages are normally required to achieve large actuator movements. Here we rep...
متن کاملAdaptive Control of an Electrostatic Micro-Actuator with Unbounded Dynamic Uncertainties based on Lyapunov Stability Criterion
In this paper, a model reference adaptive control is designed for perfect tracking of moveable electrode of an electrostatic microactuator. The adaptive control of the nonlinear model of this microactuator is constituted feedback control and adaptation law. A Lyapunov function is presented that it guarantees perfect tracking and parameter convergences. The simulation shows designed adaptive con...
متن کاملMicro Contacts and Micro Manipulation with Mems Actuator Arrays
As improvements in fabrication technology for MEMS (micro electro mechanical systems) increase the availability and diversity of these micromachines, engineers are deening a growing number of tasks to which they can be put. The idea of carrying out tasks using coordinated systems of MEMS units motivates the development of automated, algorithmic methods for modeling, designing and controlling th...
متن کاملA Low Voltage Electrostatic Micro Actuator for Large Out-of-plane Displacement
An electrostatic actuator is designed to move a 1 mm mirror, 58 μm out of plane at 25 volts. Large out-of-plane displacement is obtained from repulsive forces generated on four sets of comb drive fingers attached to the mirror plate in the middle. The proposed actuator is a customized design of a previous study for low voltage applications. The static modeling of the actuator was performed usin...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2004
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.124.381